In2O3 thin films were grown by the chemical spray pyrolysis (CSP) method
using the pneumatic spray set-up and compressed air as a carrier gas. Aqueous
solutions containing InCl3.4H2O were deposited onto preheated glass sheets at
substrate temperatures Ts=423–573K. X-ray differection (XRD) analysis
confirmed the cubic bixbyite structure of indium oxide. The preferred growth
orientation along the (211) plane for thin films. The crystallite size extracted from
the XRD data corroborates the changes in full width at half maximum due to the
variation in substrate temperature. It was shown that grain size of In2O3 thin film
was (30)nm. Optical properties of In2O3 was studies and showed that the optical
parameters (n, k α) were affected by substrate temperature.
Key word: Indium oxide, optical properties, nanostructure.
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